RUcore: Rutgers University Community Repository
Design and fabrication of 4H-SiC detectors towards single photon counting
Descriptive
TitleInfo
(displayLabel = Citation Title);
(type = uniform)
Title
Design and fabrication of 4H-SiC detectors towards single photon counting
Name
(ID = NAME001);
(type = personal)
NamePart
(type = family)
Xin
NamePart
(type = given)
Xiaobin
DisplayForm
Xiaobin Xin
Role
RoleTerm
(authority = RULIB)
author
Name
(ID = NAME002);
(type = personal)
NamePart
(type = family)
Zhao
NamePart
(type = given)
Jian
Affiliation
Advisory Committee
DisplayForm
Jian H. Zhao
Role
RoleTerm
(authority = RULIB)
chair
Name
(ID = NAME003);
(type = personal)
NamePart
(type = family)
Sheng
NamePart
(type = given)
Kuang
Affiliation
Advisory Committee
DisplayForm
Kuang Sheng
Role
RoleTerm
(authority = RULIB)
internal member
Name
(ID = NAME004);
(type = personal)
NamePart
(type = family)
Panayotatos
NamePart
(type = given)
Paul
Affiliation
Advisory Committee
DisplayForm
Paul Panayotatos
Role
RoleTerm
(authority = RULIB)
internal member
Name
(ID = NAME005);
(type = personal)
NamePart
(type = family)
Weiner
NamePart
(type = given)
Maurice
Affiliation
Advisory Committee
DisplayForm
Maurice Weiner
Role
RoleTerm
(authority = RULIB)
outside member
Name
(ID = NAME006);
(type = corporate)
NamePart
Rutgers University
Role
RoleTerm
(authority = RULIB)
degree grantor
Name
(ID = NAME007);
(type = corporate)
NamePart
Graduate School - New Brunswick
Role
RoleTerm
(authority = RULIB)
school
TypeOfResource
Text
Genre
(authority = marcgt)
theses
OriginInfo
DateCreated
(qualifier = exact)
2007
DateOther
(qualifier = exact);
(type = degree)
2007
Language
LanguageTerm
English
PhysicalDescription
Form
(authority = marcform)
electronic
InternetMediaType
application/pdf
InternetMediaType
text/xml
Extent
xix, 193 pages
Abstract
This thesis covers initiative works and innovative improvements in designing, fabricating and calibrating the world's first 4H-SiC single photon avalanche diodes (SPADs). In comparison to previous SiC APDs, the SiC SPADs have completely different targets. Major improvements are made in almost all aspects from wafer structure design, mask design, to characterizations. The robust and radiation-hard SiC SPADs, which are designed to replace the bulky PMTs and fragile Si SPADs, target at ultra high sensitive UV detection, towards the ultimate sensitivity--quantum limit. SiC SPADs can be widely used in missile and aircraft alarm system, none-line-of-sight (NLOS) and quantum communications, UV 3-D imaging, downhole exploration, as well as many NASA applications, such as low-earth orbit fluorescence observations.
The following areas are discussed in details in this thesis: wafer structure and mask design, a new bevel and MJTE edge termination technology for SiC SPADs, as well as improvements for an ultra low dark current, high quantum efficiency, and low dark count rate and high single photon detection efficiency. Future work is also proposed for further improving SiC SPADs.
The milestones in this thesis work include, the world's first SiC SPAD fabricated in 2004; the world's largest SiC SPAD (260µmx260µm) in 2004; a single photon counting measurement system with passive quenching circuit in 2004; a SiC SPAD with the highest gain (109) in 2005; a SiC SPAD with the lowest dark current ([less than]4fA at 50% of breakdown voltage and [less than]26fA at 95% of breakdown voltage) in 2007; the world's first SiC SAM SPAD with thick absorption layer, high quantum efficiency (~58%), and a significantly lower dark count rate than the first SiC SPAD in 2007; a new bevel edge termination technology; and a new p-type metal recipe leading to a low 10-4~ low 10-5Ωcm2 specific contact resistance for p-type 4H-SiC with minimum consumption of SiC ([less than]1500Å) in 2007.
The following areas are discussed in details in this thesis: wafer structure and mask design, a new bevel and MJTE edge termination technology for SiC SPADs, as well as improvements for an ultra low dark current, high quantum efficiency, and low dark count rate and high single photon detection efficiency. Future work is also proposed for further improving SiC SPADs.
The milestones in this thesis work include, the world's first SiC SPAD fabricated in 2004; the world's largest SiC SPAD (260µmx260µm) in 2004; a single photon counting measurement system with passive quenching circuit in 2004; a SiC SPAD with the highest gain (109) in 2005; a SiC SPAD with the lowest dark current ([less than]4fA at 50% of breakdown voltage and [less than]26fA at 95% of breakdown voltage) in 2007; the world's first SiC SAM SPAD with thick absorption layer, high quantum efficiency (~58%), and a significantly lower dark count rate than the first SiC SPAD in 2007; a new bevel edge termination technology; and a new p-type metal recipe leading to a low 10-4~ low 10-5Ωcm2 specific contact resistance for p-type 4H-SiC with minimum consumption of SiC ([less than]1500Å) in 2007.
Note
(type = degree)
Ph.D.
Note
(type = bibliography)
Includes bibliographical references (p. 188-191).
Subject
(ID = SUBJ1);
(authority = RUETD)
Topic
Electrical and Computer Engineering
Subject
(ID = SUBJ2);
(authority = ETD-LCSH)
Topic
Semiconductors
Subject
(ID = SUBJ3);
(authority = ETD-LCSH)
Topic
Photon detectors
RelatedItem
(type = host)
TitleInfo
Title
Graduate School - New Brunswick Electronic Theses and Dissertations
Identifier
(type = local)
rucore19991600001
Identifier
(type = hdl)
http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.16797
Identifier
ETD_557
Location
PhysicalLocation
(authority = marcorg);
(displayLabel = Rutgers, The State University of New Jersey)
NjNbRU
Identifier
(type = doi)
doi:10.7282/T3C829PQ
Genre
(authority = ExL-Esploro)
ETD doctoral
Back to the top
Rights
RightsDeclaration
(AUTHORITY = GS);
(ID = rulibRdec0006)
The author owns the copyright to this work.
Copyright
Status
Copyright protected
Availability
Status
Open
AssociatedEntity
(AUTHORITY = rulib);
(ID = 1)
Name
Xiaobin Xin
Role
Copyright holder
Affiliation
Rutgers University. Graduate School - New Brunswick
RightsEvent
(AUTHORITY = rulib);
(ID = 1)
Type
Permission or license
Detail
Non-exclusive ETD license
AssociatedObject
(AUTHORITY = rulib);
(ID = 1)
Type
License
Name
Author Agreement License
Detail
I hereby grant to the Rutgers University Libraries and to my school the non-exclusive right to archive, reproduce and distribute my thesis or dissertation, in whole or in part, and/or my abstract, in whole or in part, in and from an electronic format, subject to the release date subsequently stipulated in this submittal form and approved by my school. I represent and stipulate that the thesis or dissertation and its abstract are my original work, that they do not infringe or violate any rights of others, and that I make these grants as the sole owner of the rights to my thesis or dissertation and its abstract. I represent that I have obtained written permissions, when necessary, from the owner(s) of each third party copyrighted matter to be included in my thesis or dissertation and will supply copies of such upon request by my school. I acknowledge that RU ETD and my school will not distribute my thesis or dissertation or its abstract if, in their reasonable judgment, they believe all such rights have not been secured. I acknowledge that I retain ownership rights to the copyright of my work. I also retain the right to use all or part of this thesis or dissertation in future works, such as articles or books.
Back to the top
Technical
Format
(TYPE = mime);
(VERSION = )
application/x-tar
FileSize
(UNIT = bytes)
9434624
Checksum
(METHOD = SHA1)
fd775e03e02352ddc92780968c0e799de533c50e
ContentModel
ETD
CompressionScheme
other
OperatingSystem
(VERSION = 5.1)
windows xp
Format
(TYPE = mime);
(VERSION = NULL)
application/x-tar
Back to the top
Statistical Profile