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4H-SiC detectors for low level ultraviolet detection
Descriptive
TitleInfo
(displayLabel = Citation Title);
(type = uniform)
Title
4H-SiC detectors for low level ultraviolet detection
Name
(ID = NAME001);
(type = personal)
NamePart
(type = family)
Hu
NamePart
(type = given)
Jun
DisplayForm
Jun Hu
Role
RoleTerm
(authority = RULIB)
author
Name
(ID = NAME002);
(type = personal)
NamePart
(type = family)
Zhao
NamePart
(type = given)
Jian
Affiliation
Advisory Committee
DisplayForm
Jian H Zhao
Role
RoleTerm
(authority = RULIB)
chair
Name
(ID = NAME003);
(type = personal)
NamePart
(type = family)
Sheng
NamePart
(type = given)
Kuang
Affiliation
Advisory Committee
DisplayForm
Kuang Sheng
Role
RoleTerm
(authority = RULIB)
internal member
Name
(ID = NAME004);
(type = personal)
NamePart
(type = family)
Jiang
NamePart
(type = given)
Wei
Affiliation
Advisory Committee
DisplayForm
Wei Jiang
Role
RoleTerm
(authority = RULIB)
internal member
Name
(ID = NAME005);
(type = personal)
NamePart
(type = family)
Weiner
NamePart
(type = given)
Maurice
Affiliation
Advisory Committee
DisplayForm
Maurice Weiner
Role
RoleTerm
(authority = RULIB)
outside member
Name
(ID = NAME006);
(type = corporate)
NamePart
Rutgers University
Role
RoleTerm
(authority = RULIB)
degree grantor
Name
(ID = NAME007);
(type = corporate)
NamePart
Graduate School - New Brunswick
Role
RoleTerm
(authority = RULIB)
school
TypeOfResource
Text
Genre
(authority = marcgt)
theses
OriginInfo
DateCreated
(qualifier = exact)
2008
DateOther
(qualifier = exact);
(type = degree)
2008-10
Language
LanguageTerm
English
PhysicalDescription
Form
(authority = marcform)
electronic
InternetMediaType
application/pdf
InternetMediaType
text/xml
Extent
ix, 158 pages
Abstract
Ultraviolet radiation covers the wavelength from 400nm down to 10nm. The superior material properties of 4H-SiC make visible-blind, ultra sensitive and low noise UV photodetectors possible.
The major objective of this Ph.D. thesis research is to design and fabricate high performance 4H-SiC photodetectors for low-level UV detection. Schottky photodiodes, avalanche PIN photodiodes and avalanche phototransistors are studied for various applications.
In this study, the first 4H-SiC Schottky photodiode that can fully cover EUV to NUV range has been successfully fabricated. Ultralow leakage current, high quantum efficiency and high UV-to-visible rejection ratio have been achieved. The first 1x16 4H-SiC Schottky photodiode array with very large detection area has been successfully fabricated and characterized. A novel UV spectrographic system using the 4H-SiC Schottky photodiode array is demonstrated with a fine spectrum resolution.
4H-SiC single photon avalanche photodiode (SPAD) is studied for UV single photon detection. In this work, many challenging issues including bevel edge termination and ohmic contact have been addressed. The 4H-SiC SPADs show high gain, low dark count rate and good single photon detection efficiency (SPDE). The best 4H-SiC SPAD shows a high counting efficiency of 79% and 32.5% with a dark count rate of 125.3 kHz and 38.8 kHz at -119.4 V and -119 V, respectively. The first 4H-SiC SPAD array has been successfully fabricated and characterized. Only 1 pixel out of 33 pixels shows high leakage and high dark count rate. For all the good pixels working at -119.5V, the gain is greater than 106, the dark count rate is less than 100 kHz and the SPDE is more than 2%. The proton irradiation impact to 4H-SiC single photon avalanche diodes is investigated for the first time.
A novel 4H-SiC avalanche phototransistor structure is also studied in this research. The first 4H-SiC avalanche phototransistor is demonstrated with an optical gain greater than 4.5x104.
The major objective of this Ph.D. thesis research is to design and fabricate high performance 4H-SiC photodetectors for low-level UV detection. Schottky photodiodes, avalanche PIN photodiodes and avalanche phototransistors are studied for various applications.
In this study, the first 4H-SiC Schottky photodiode that can fully cover EUV to NUV range has been successfully fabricated. Ultralow leakage current, high quantum efficiency and high UV-to-visible rejection ratio have been achieved. The first 1x16 4H-SiC Schottky photodiode array with very large detection area has been successfully fabricated and characterized. A novel UV spectrographic system using the 4H-SiC Schottky photodiode array is demonstrated with a fine spectrum resolution.
4H-SiC single photon avalanche photodiode (SPAD) is studied for UV single photon detection. In this work, many challenging issues including bevel edge termination and ohmic contact have been addressed. The 4H-SiC SPADs show high gain, low dark count rate and good single photon detection efficiency (SPDE). The best 4H-SiC SPAD shows a high counting efficiency of 79% and 32.5% with a dark count rate of 125.3 kHz and 38.8 kHz at -119.4 V and -119 V, respectively. The first 4H-SiC SPAD array has been successfully fabricated and characterized. Only 1 pixel out of 33 pixels shows high leakage and high dark count rate. For all the good pixels working at -119.5V, the gain is greater than 106, the dark count rate is less than 100 kHz and the SPDE is more than 2%. The proton irradiation impact to 4H-SiC single photon avalanche diodes is investigated for the first time.
A novel 4H-SiC avalanche phototransistor structure is also studied in this research. The first 4H-SiC avalanche phototransistor is demonstrated with an optical gain greater than 4.5x104.
Note
(type = degree)
Ph.D.
Note
(type = bibliography)
Includes bibliographical references (p. 147-155).
Subject
(ID = SUBJ1);
(authority = RUETD)
Topic
Electrical and Computer Engineering
Subject
(ID = SUBJ2);
(authority = ETD-LCSH)
Topic
Silicon carbide
Subject
(ID = SUBJ3);
(authority = ETD-LCSH)
Topic
Optical detectors
Subject
(ID = SUBJ4);
(authority = ETD-LCSH)
Topic
Photodiodes
Subject
(ID = SUBJ5);
(authority = ETD-LCSH)
Topic
Ultraviolet radiation
RelatedItem
(type = host)
TitleInfo
Title
Graduate School - New Brunswick Electronic Theses and Dissertations
Identifier
(type = local)
rucore19991600001
Identifier
(type = hdl)
http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.17497
Identifier
ETD_1140
Location
PhysicalLocation
(authority = marcorg);
(displayLabel = Rutgers, The State University of New Jersey)
NjNbRU
Identifier
(type = doi)
doi:10.7282/T3JW8F7K
Genre
(authority = ExL-Esploro)
ETD doctoral
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RightsDeclaration
(AUTHORITY = GS);
(ID = rulibRdec0006)
The author owns the copyright to this work.
Copyright
Status
Copyright protected
Availability
Status
Open
AssociatedEntity
(AUTHORITY = rulib);
(ID = 1)
Name
Jun Hu
Role
Copyright holder
Affiliation
Rutgers University. Graduate School - New Brunswick
RightsEvent
(AUTHORITY = rulib);
(ID = 1)
Type
Permission or license
Detail
Non-exclusive ETD license
AssociatedObject
(AUTHORITY = rulib);
(ID = 1)
Type
License
Name
Author Agreement License
Detail
I hereby grant to the Rutgers University Libraries and to my school the non-exclusive right to archive, reproduce and distribute my thesis or dissertation, in whole or in part, and/or my abstract, in whole or in part, in and from an electronic format, subject to the release date subsequently stipulated in this submittal form and approved by my school. I represent and stipulate that the thesis or dissertation and its abstract are my original work, that they do not infringe or violate any rights of others, and that I make these grants as the sole owner of the rights to my thesis or dissertation and its abstract. I represent that I have obtained written permissions, when necessary, from the owner(s) of each third party copyrighted matter to be included in my thesis or dissertation and will supply copies of such upon request by my school. I acknowledge that RU ETD and my school will not distribute my thesis or dissertation or its abstract if, in their reasonable judgment, they believe all such rights have not been secured. I acknowledge that I retain ownership rights to the copyright of my work. I also retain the right to use all or part of this thesis or dissertation in future works, such as articles or books.
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Technical
Format
(TYPE = mime);
(VERSION = )
application/x-tar
FileSize
(UNIT = bytes)
5346816
Checksum
(METHOD = SHA1)
149278c337e871a1f6bc9a69e01d31693e7a328b
ContentModel
ETD
CompressionScheme
other
OperatingSystem
(VERSION = 5.1)
windows xp
Format
(TYPE = mime);
(VERSION = NULL)
application/x-tar
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