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Flow structure and heat transfer in an impinging jet CVD reactor
Descriptive
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Text
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Title
Flow structure and heat transfer in an impinging jet CVD reactor
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ETD_2103
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http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.000051878
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eng
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theses
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Mechanical and Aerospace Engineering
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Topic
Chemical vapor deposition
Subject
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(authority = ETD-LCSH)
Topic
Chemical reactors
Abstract
A detailed experimental study is undertaken to investigate the flow structure and heat transfer in an impinging jet Chemical Vapor Deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform deposition across the substrate. Free convection can negatively affect the gas flow as cold inlet gas impinges on the heated substrate, leading to vortices and disturbances in the normal flow path. This experimental research will be used to understand the buoyancy-induced and momentum-driven flow structure encountered in an impinging jet CVD reactor. Investigations are conducted for various operational parameters such as substrate temperature and inlet velocity. In addition, different reactor geometries with varying inlet length and height between the substrate and inlet are included in the study. Experimental results obtained from the study provide information on the temperature distribution, heat transfer rates, and flow field. Such results validate the operation of the reactor at atmospheric pressure and provide valuable insight into future design of impinging jet CVD reactors.
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electronic resource
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xiii, 67 p. : ill.
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M.S.
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Includes bibliographical references (p. 64-67)
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by Nasir Memon
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Memon
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Nasir
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1982-
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Nasir Memon
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Jaluria
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Yogesh
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chair
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Yogesh Jaluria
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Tse
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Stephen
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internal member
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Stephen Tse
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Diez
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F. Javier
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F. Javier Diez
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Rutgers University
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degree grantor
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Graduate School - New Brunswick
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2009
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2009-10
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xx
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Rutgers University Electronic Theses and Dissertations
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ETD
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Graduate School - New Brunswick Electronic Theses and Dissertations
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rucore19991600001
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doi:10.7282/T3GT5NCD
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ETD graduate
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Rights
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The author owns the copyright to this work
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Copyright protected
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Open
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Permission or license
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Memon
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Nasir
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Nasir Memon
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Rutgers University. Graduate School - New Brunswick
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Author Agreement License
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I hereby grant to the Rutgers University Libraries and to my school the non-exclusive right to archive, reproduce and distribute my thesis or dissertation, in whole or in part, and/or my abstract, in whole or in part, in and from an electronic format, subject to the release date subsequently stipulated in this submittal form and approved by my school. I represent and stipulate that the thesis or dissertation and its abstract are my original work, that they do not infringe or violate any rights of others, and that I make these grants as the sole owner of the rights to my thesis or dissertation and its abstract. I represent that I have obtained written permissions, when necessary, from the owner(s) of each third party copyrighted matter to be included in my thesis or dissertation and will supply copies of such upon request by my school. I acknowledge that RU ETD and my school will not distribute my thesis or dissertation or its abstract if, in their reasonable judgment, they believe all such rights have not been secured. I acknowledge that I retain ownership rights to the copyright of my work. I also retain the right to use all or part of this thesis or dissertation in future works, such as articles or books.
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1576960
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