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Two topics in surface science

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TypeOfResource
Text
TitleInfo (ID = T-1)
Title
Two topics in surface science
SubTitle
morphological changes of NiA(111) induced by oxygen : secondary electron yield studies of Ru and TiO2 surfaces related to extreme ultraviolet lithography
Identifier
ETD_716
Identifier (type = hdl)
http://hdl.rutgers.edu/1782.1/rucore10001600001.ETD.000054830
Language
LanguageTerm (authority = ISO639-2); (type = code)
eng
Genre (authority = marcgt)
theses
Subject (ID = SBJ-1); (authority = RUETD)
Topic
Physics and Astronomy
Subject (ID = SBJ-2); (authority = ETD-LCSH)
Topic
Surface chemistry
Abstract (type = abstract)
This dissertation reports on two surface science projects: (1) one focuses on a study of oxygen-induced faceting of a NiAl(111) single crystal surface as a potential support for model catalysts; and (2) the other concerns secondary electron yield studies of TiO2(011) and Ru(0001), which are models of ruthenium and titanium dioxide capping layers on Mo/Si multilayer mirrors designed for applications in Extreme Ultraviolet Lithography (EUVL). It is known that monolayer films of oxygen can induce faceting of some atomically rough but planar metal surfaces. We extend our knowledge from surfaces of elemental metals to atomically rough metal alloy surfaces, such as NiAl(111). We discovered that the NiAl(111) surface exhibits an unusual behavior upon interaction with oxygen, including nanometer scale facet formation and growth of micrometer scale dendritic features. A series of experiments aimed at understanding the adsorption of oxygen and oxygen-induced faceting of NiAl(111) employing a variety of ultrahigh vacuum surface characterization methods. The atomically rough NiAl(111) surface remains planar at room temperature when exposed to oxygen. However, the oxygen-covered surface changes its morphology and forms nanometer scale facets upon annealing in the temperature range of ~1050 K to 1200K. Covered with one monolayer-thick γ-Al2O3 film, three-sided facets of {110} orientation appear. These facets coexist with the planar (111) surface. The surface becomes planar upon annealing in UHV above ~1250K. After prolonged exposure to oxygen at elevated temperatures three dimensional features exhibiting three-fold symmetry erupted from the surface; their dimensions are several micrometers in length, and ~300 nm high; their orientation is along low index < 01> directions in the plane of the NiAl(111) substrate. SEM X-ray mapping and EDS measurements indicate that these are spinel (NiAl2O4) structures; further investigation with SPEM revealed that these structures consist of γ-Al2O3 and NiAl2O4 oxides. Finally, TEM studies of the cross section of dendrites-covered NiAl(111) surface detected that γ-Al2O3 [13 ] is aligned with the NiAl[111] direction with a mismatch angle of 6˚. Ruthenium and titanium dioxide capping layers ~2 nm thick protect and extend the lifetimes of Mo/Si multilayer mirrors (MLMs) used in EUVL. The magnitude of secondary electron yield (SEY) at EUV wavelengths (13.5nm) is a major factor in determining contamination rates of MLMs in EUV projection optics. Low energy secondary electrons (0 to ~ 20 eV) cause dissociation of adsorbed hydrocarbons from the background gas, and lead to carbon film growth on MLM surfaces. In this dissertation, we investigate SEY for model EUV optics cap layer materials -TiO2 and Ru single crystals (clean, O-covered, C-covered, air exposed) and compare them with measurements for Mo/Si multilayer films capped with Ru, TiO2, and RuO2. SEY measurements were performed using synchrotron radiation over the range 40 eV to 180 eV at three different beamlines (U4A, U5UA, and U3C) at NSLS. For photon beams incident at 45˚, the shapes of the curves for Ru MLMs, especially the maxima at ~ 65 eV due to the Ru 4p excitation, are very similar to the data for pure Ru; such similarities are found also for a TiO2 crystal and TiO2-capped MLMs. The observation that the cap layer properties dominate the SEY characteristics agrees with theory. For near normal incidence, and for photon energies ~92 eV, dramatic energy- and angle-dependent resonances in SEY are observed for the capped MLMs, with SEYs 2 to 3 times higher than off-resonance. Calculations show excellent correlations between the photon electric field strength on the surface of a cap layer and the angular-dependent SEYs.
PhysicalDescription
Form (authority = gmd)
electronic resource
Extent
xxiv, 156 p. : ill.
InternetMediaType
application/pdf
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text/xml
Note (type = degree)
Ph.D.
Note
Includes abstract
Note
Vita
Note (type = bibliography)
Includes bibliographical references
Note (type = statement of responsibility)
by Elena Loginova
Name (ID = NAME-1); (type = personal)
NamePart (type = family)
Loginova
NamePart (type = given)
Elena
Role
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author
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Elena Loginova
Name (ID = NAME-2); (type = personal)
NamePart (type = family)
Madey
NamePart (type = given)
Theodore E
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chair
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Advisory Committee
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Theodore E Madey
Name (ID = NAME-3); (type = personal)
NamePart (type = family)
Gustafsson
NamePart (type = given)
Torgny
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internal member
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Advisory Committee
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Torgny Gustafsson
Name (ID = NAME-4); (type = personal)
NamePart (type = family)
Coleman
NamePart (type = given)
Piers
Role
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internal member
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Advisory Committee
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Piers Coleman
Name (ID = NAME-5); (type = personal)
NamePart (type = family)
Gilman
NamePart (type = given)
Ronald
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internal member
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Advisory Committee
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Ronald Gilman
Name (ID = NAME-6); (type = personal)
NamePart (type = family)
Hulbert
NamePart (type = given)
Steven
Role
RoleTerm (authority = RULIB)
outside member
Affiliation
Advisory Committee
DisplayForm
Steven Hulbert
Name (ID = NAME-1); (type = corporate)
NamePart
Rutgers University
Role
RoleTerm (authority = RULIB)
degree grantor
Name (ID = NAME-2); (type = corporate)
NamePart
Graduate School - New Brunswick
Role
RoleTerm (authority = RULIB)
school
OriginInfo
DateCreated (qualifier = exact)
2008
DateOther (qualifier = exact); (type = degree)
2008
Place
PlaceTerm (type = code)
xx
RelatedItem (type = host)
TitleInfo
Title
Rutgers University Electronic Theses and Dissertations
Identifier (type = RULIB)
ETD
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TitleInfo
Title
Graduate School - New Brunswick Electronic Theses and Dissertations
Identifier (type = local)
rucore19991600001
Location
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NjNbRU
Identifier (type = doi)
doi:10.7282/T3GF0TFP
Genre (authority = ExL-Esploro)
ETD doctoral
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The author owns the copyright to this work.
Copyright
Status
Copyright protected
Availability
Status
Open
Reason
Permission or license
RightsHolder (ID = PRH-1); (type = personal)
Name
FamilyName
Loginova
GivenName
Elena
Role
Copyright Holder
RightsEvent (ID = RE-1); (AUTHORITY = rulib)
Type
Permission or license
DateTime
2008-01-04 01:27:36
AssociatedEntity (ID = AE-1); (AUTHORITY = rulib)
Role
Copyright holder
Name
Elena Loginova
Affiliation
Rutgers University. Graduate School - New Brunswick
AssociatedObject (ID = AO-1); (AUTHORITY = rulib)
Type
License
Name
Author Agreement License
Detail
I hereby grant to the Rutgers University Libraries and to my school the non-exclusive right to archive, reproduce and distribute my thesis or dissertation, in whole or in part, and/or my abstract, in whole or in part, in and from an electronic format, subject to the release date subsequently stipulated in this submittal form and approved by my school. I represent and stipulate that the thesis or dissertation and its abstract are my original work, that they do not infringe or violate any rights of others, and that I make these grants as the sole owner of the rights to my thesis or dissertation and its abstract. I represent that I have obtained written permissions, when necessary, from the owner(s) of each third party copyrighted matter to be included in my thesis or dissertation and will supply copies of such upon request by my school. I acknowledge that RU ETD and my school will not distribute my thesis or dissertation or its abstract if, in their reasonable judgment, they believe all such rights have not been secured. I acknowledge that I retain ownership rights to the copyright of my work. I also retain the right to use all or part of this thesis or dissertation in future works, such as articles or books.
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ETD
MimeType (TYPE = file)
application/pdf
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application/x-tar
FileSize (UNIT = bytes)
41000960
Checksum (METHOD = SHA1)
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