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Effect of Ramping-Up Rate on Film Thickness for Spin-On Processing (2005)
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Birnie, Dunbar P. & Hau, Steven K. & Kamber, Derrick S. & Kaz, David M. (2005). Effect of Ramping-Up Rate on Film Thickness for Spin-On Processing. Journal of Materials Science: Materials in Electronics, 16(11-12), 3993-3997. Retrieved from https://doi.org/doi:10.7282/T3JM27RS

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