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Dewetting of thin films on flexible substrates via direct-write laser exposure
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Ferrer, Anthony Jesus. Dewetting of thin films on flexible substrates via direct-write laser exposure. Retrieved from https://doi.org/doi:10.7282/T32V2HZV

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TitleDewetting of thin films on flexible substrates via direct-write laser exposure
NameFerrer, Anthony Jesus (author); Amatucci, Glenn G. (chair); Matthewson, Michael John (internal member); Klein, Lisa (internal member); Tse, Stephen (outside member); Rutgers University; Graduate School - New Brunswick
Date Created2015
Other Date2015-05 (degree)
SubjectMaterials Science and Engineering, Thin films, Microelectromechanical systems
Extent1 online resource (xiv, 124 p. : ill.)
DescriptionMicroelectromechanical systems (MEMS) have enabled a wide variety of technologies both in the consumer space and in industrial/research areas. At the market level, such devices advance by the invention and innovation of production techniques. Additionally, there has been increased demand for flexible versions of such MEMS devices. Thin film patterning, represents a key technology for the realization of such flexible electronics. Patterns and methods that can be directly written into the thin film allow for design modification on the fly with the need for harsh chemicals and long etching steps. Laser-induced dewetting has the potential to create patterns in thin films at both the microscopic and nanoscopic level without wasting deposited material. This thesis presents the first demonstration of high-speed direct-write patterning of metallic thin films that uses a laser-induced dewetting phenomenon to prevent material loss. The ability to build film material with this technique is explored using various scanning geometries. Finally, demonstrations of direct-write dewetting of a variety of thin films will be presented with special consideration for high melting point metals deposited upon polymer substrates.
NotePh.D.
NoteIncludes bibliographical references
Noteby Anthony Jesus Ferrer
Genretheses, ETD doctoral
Persistent URLhttps://doi.org/doi:10.7282/T32V2HZV
Languageeng
CollectionGraduate School - New Brunswick Electronic Theses and Dissertations
Organization NameRutgers, The State University of New Jersey
RightsThe author owns the copyright to this work.
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