Home
Resource
Experimental study of flow and heat transfer in a rotating chemical vapor deposition reactor
PDF
PDF format is widely accepted and good for printing.
Plug-in required
PDF-1(7.71 MB)
Citation & Export
View Usage Statistics
Staff View

Citation & Export
Hide

Simple citation

Wong, Sun. Experimental study of flow and heat transfer in a rotating chemical vapor deposition reactor. Retrieved from https://doi.org/doi:10.7282/T3PG1TMH

Export

Click here for information about Citation Management Tools at Rutgers.

Statistics
Hide

Description

TitleExperimental study of flow and heat transfer in a rotating chemical vapor deposition reactor
NameWong, Sun (author); Jaluria, Yogesh (chair); Guo, Zhixiong (internal member); Diez-Garias, F. Javier (internal member); Rutgers University; Graduate School - New Brunswick
Date Created2015
Other Date2015-05 (degree)
SubjectMechanical and Aerospace Engineering, Heat--Transmission, Chemical vapor deposition
Extent1 online resource (viii, 54 p. : ill.)
DescriptionAn experimental model was set up to study the rotating vertical impinging chemical vapor deposition reactor. Deposition occurs only when the system has enough thermal energy. Therefore, understanding the fluid characteristic and heat transfer of the system will provide a good basis to understand the full model. Growth rate and the uniformity of the film are the two most important factors in CVD process and it is depended on the flow and thermal characteristic within the system. Optimizing the operating parameters will result in better growth rate and uniformity. Operating parameters such as inflow velocity, inflow diameter and rotational speed are used to create different design simulations. Fluid velocities and various temperatures are recorded to see the effects of the different operating parameters. Velocities are recorded by using flow meter and hot wire anemometer. Temperatures are recorded by using various thermocouples and infrared thermometer. The result should provide a quantitative basis for the prediction, design and optimization of the system and process for design and fabrication of future CVD reactors. Further assessment of the system results will be discuss in detail such as effects of buoyancy and effects of rotation. The experimental study also coupled with a numerical study for further validation of both model. Comparisons between the two models are also presented.
NoteM.S.
NoteIncludes bibliographical references
Noteby Sun Wong
Genretheses, ETD graduate
Persistent URLhttps://doi.org/doi:10.7282/T3PG1TMH
Languageeng
CollectionGraduate School - New Brunswick Electronic Theses and Dissertations
Organization NameRutgers, The State University of New Jersey
RightsThe author owns the copyright to this work.
Version 8.5.5
Rutgers University Libraries - Copyright ©2024