DescriptionRadiocarbon is extremely useful for archeological dating as well as for clinical, laboratory and atmospheric tracer applications. In this thesis, we report a new physical description of the ICOGS system process of radiocarbon optogalvanic signal extraction and analysis. To be specific, we first describe the fundamental theory of the Optogalvanic effect. Based on a set of 4-energy level rate equations for N2 buffer gas and a set of 2-energy level for CO2 sample gas, we simulate the N2 and CO2 ICOGS OG signals. Moreover, according to the phase difference from our simulation and experiment observation, we propose three methods (1.Vector Phase and Amplitude fitting, 2.Differential Method and 3.Vector Decomposition Method) to separate CO2 OG signal from N2 OG signal. Experimental results demonstrate our quantitative radiocarbon detection near 10 zeptomole14C levels in 10 µg samples.