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Design & finite element analysis of micro electro mechanical capacitive temperature sensors

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TitleInfo
Title
Design & finite element analysis of micro electro mechanical capacitive temperature sensors
Name (type = personal)
NamePart (type = family)
Khan
NamePart (type = given)
Nabeela Zabin
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Nabeela Zabin Khan
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author
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Jeon
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Jaeseok
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Jaeseok Jeon
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Advisory Committee
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chair
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Rutgers University
Role
RoleTerm (authority = RULIB)
degree grantor
Name (type = corporate)
NamePart
Graduate School - New Brunswick
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school
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Text
Genre (authority = marcgt)
theses
OriginInfo
DateCreated (qualifier = exact)
2017
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2017-01
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2017
Place
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xx
Language
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eng
Abstract (type = abstract)
This thesis presents the design and simulation of micrometer-scale capacitive temperature sensors, which could serve as a component for miniaturized wireless sensor nodes for the internet of things requiring structural flexibility and optical transparency. The proposed sensor design employs a conventional, planar interdigitated capacitor structure, explores the thermo-mechanical property (thermal expansion coefficient) of various sensing materials including a conductive polymer, and can be easily implemented using a single-layer surface micromachining process. The operating characteristics of prototype sensors comprising different sensing electrodes are investigated as a function of various physical design parameters using numerical simulation software, which uses the finite element method (FEM). FEM simulation results show that the prototype sensor that utilizes a conductive polymer for the sensing electrode exhibits a reasonably good linearity and sensitivity (~0.31 fF/˚C) over a relatively wide temperature range (between 7 and 127 ˚C). The dimensions and electrode materials (e.g., Au, Cr and W) of the proposed sensor can be readily customized for different temperature ranges required for different applications.
Subject (authority = RUETD)
Topic
Electrical and Computer Engineering
Subject (authority = ETD-LCSH)
Topic
Detectors
Subject (authority = ETD-LCSH)
Topic
Temperature measuring instruments
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Title
Rutgers University Electronic Theses and Dissertations
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ETD_7792
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electronic resource
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Extent
1 online resource (xiii, 65 p. : ill.)
Note (type = degree)
M.S.
Note (type = bibliography)
Includes bibliographical references
Note (type = statement of responsibility)
by Nabeela Zabin Khan
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Title
Graduate School - New Brunswick Electronic Theses and Dissertations
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rucore19991600001
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NjNbRU
Identifier (type = doi)
doi:10.7282/T3TX3HTZ
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Rights

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The author owns the copyright to this work.
RightsHolder (type = personal)
Name
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Khan
GivenName
Nabeela
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Zabin
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RightsEvent
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Permission or license
DateTime (encoding = w3cdtf); (qualifier = exact); (point = start)
2016-12-20 18:55:34
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Name
Nabeela Khan
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Copyright holder
Affiliation
Rutgers University. Graduate School - New Brunswick
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Author Agreement License
Detail
I hereby grant to the Rutgers University Libraries and to my school the non-exclusive right to archive, reproduce and distribute my thesis or dissertation, in whole or in part, and/or my abstract, in whole or in part, in and from an electronic format, subject to the release date subsequently stipulated in this submittal form and approved by my school. I represent and stipulate that the thesis or dissertation and its abstract are my original work, that they do not infringe or violate any rights of others, and that I make these grants as the sole owner of the rights to my thesis or dissertation and its abstract. I represent that I have obtained written permissions, when necessary, from the owner(s) of each third party copyrighted matter to be included in my thesis or dissertation and will supply copies of such upon request by my school. I acknowledge that RU ETD and my school will not distribute my thesis or dissertation or its abstract if, in their reasonable judgment, they believe all such rights have not been secured. I acknowledge that I retain ownership rights to the copyright of my work. I also retain the right to use all or part of this thesis or dissertation in future works, such as articles or books.
RightsEvent
DateTime (encoding = w3cdtf); (qualifier = exact); (point = start)
2017-01-31
DateTime (encoding = w3cdtf); (qualifier = exact); (point = end)
2019-01-31
Type
Embargo
Detail
Access to this PDF has been restricted at the author's request. It will be publicly available after January 31st, 2019.
Copyright
Status
Copyright protected
Availability
Status
Open
Reason
Permission or license
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2016-12-21T20:45:34
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2016-12-21T20:45:34
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