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Modification of silicon by self-assembled monolayers for application in nano-electronics and biology
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Title
Modification of silicon by self-assembled monolayers for
application in nano-electronics and biology
application in nano-electronics and biology
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Li
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Meng
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1977-
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Meng Li
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author
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Chabal
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Yves
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Advisory Committee
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Yves J. Chabal
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chair
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Garfunkel
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Eric
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Advisory Committee
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Eric L. Garfunkel
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internal member
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Zamick
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Larry
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Advisory Committee
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Larry Zamick
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internal member
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Kojima
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Haruo
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Advisory Committee
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Haruo Kojima
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internal member
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Kim
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Sobin
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Advisory Committee
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Sobin Kim
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outside member
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Rutgers University
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degree grantor
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Graduate School - New Brunswick
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theses
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2007
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2007
Language
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English
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electronic
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x, 185 pages
Abstract
Fourier Transform Infrared Spectroscopy (FTIR) is employed to investigate surface and interface properties of several self-assembled monolayers (SAMs) systems on silicon and applications in optimizing attachment of biomolecules and Atomic Layer Deposition (ALD) of high-k metal oxides are explored. The SAM systems include silane-based SAMs on SiO2 and alkene-based SAMs (with different terminal groups) on H-terminated Si (111).
Modification of SiO2 by silane-based SAMs is presented first with emphasis on SAM/SiO2 interfacial characteristics. Spectral changes in the longitudinal-optical (LO) phonon mode of the SiO2 substrate after modification with silane-based SAMs suggest the formation of a dense cross-linked SAM chemically attached to the SiO2 substrate through Sisubstrate-O-Si bonds. A novel method is developed to prepare -NH2 terminated surface for optimized biomolecules surface attachment using (3-Aminopropyl) triethoxysilane (APTES) and hydrogen-terminated Si (111). It is demonstrated that APTES can form more stable siloxane layers on hydrogen-terminated Si (111) without extra pre-hydration or pre-oxidization of surface required by conventional silane-based methods.
The formation, structure and stability of alkene-based SAMs thermally grafted on H- terminated silicon (111) via Si-C bond (Si-C SAMs) has been investigated by infrared spectroscopy. The SAM with reactive terminal group (-COOH) shows higher thermal stability than SAM with -CH3 termination. The decomposition of alkyl chains at high temperature is through β-hydride elimination with cleavage of Si-C bond. The alkene-based SAMs are further used as model systems to study reaction and nucleation processes in ALD. The ALD of aluminum oxide on SAM-functionalized silicon with various terminal groups (-CH3, - NH2, -COOH and -OH) was systematically investigated using in situ FTIR. The results show that all Si-C bound SAMs with different terminal groups efficiently eliminate the formation of unwanted interfacial silicon oxide during ALD growth. The results also show that aluminum oxide can grow on all terminations of SAM surfaces but in a type-dependent manner, forming more homogeneous films on the -NH2, -COOH surfaces and very non-homogeneous films on -CH3-terminated surfaces due to a lack of reactive nucleation sites at the starting CH3-terminated surface.
Modification of SiO2 by silane-based SAMs is presented first with emphasis on SAM/SiO2 interfacial characteristics. Spectral changes in the longitudinal-optical (LO) phonon mode of the SiO2 substrate after modification with silane-based SAMs suggest the formation of a dense cross-linked SAM chemically attached to the SiO2 substrate through Sisubstrate-O-Si bonds. A novel method is developed to prepare -NH2 terminated surface for optimized biomolecules surface attachment using (3-Aminopropyl) triethoxysilane (APTES) and hydrogen-terminated Si (111). It is demonstrated that APTES can form more stable siloxane layers on hydrogen-terminated Si (111) without extra pre-hydration or pre-oxidization of surface required by conventional silane-based methods.
The formation, structure and stability of alkene-based SAMs thermally grafted on H- terminated silicon (111) via Si-C bond (Si-C SAMs) has been investigated by infrared spectroscopy. The SAM with reactive terminal group (-COOH) shows higher thermal stability than SAM with -CH3 termination. The decomposition of alkyl chains at high temperature is through β-hydride elimination with cleavage of Si-C bond. The alkene-based SAMs are further used as model systems to study reaction and nucleation processes in ALD. The ALD of aluminum oxide on SAM-functionalized silicon with various terminal groups (-CH3, - NH2, -COOH and -OH) was systematically investigated using in situ FTIR. The results show that all Si-C bound SAMs with different terminal groups efficiently eliminate the formation of unwanted interfacial silicon oxide during ALD growth. The results also show that aluminum oxide can grow on all terminations of SAM surfaces but in a type-dependent manner, forming more homogeneous films on the -NH2, -COOH surfaces and very non-homogeneous films on -CH3-terminated surfaces due to a lack of reactive nucleation sites at the starting CH3-terminated surface.
Note
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Ph.D.
Note
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Includes bibliographical references.
Subject
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Topic
Physics and Astronomy
Subject
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Topic
Monomolecular films
Subject
(ID = SUBJ3);
(authority = ETD-LCSH)
Topic
Silica
Subject
(ID = SUBJ4);
(authority = ETD-LCSH)
Topic
Nanotechnology
Subject
(ID = SUBJ5);
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Topic
Biotechnology
Subject
(ID = SUBJ6);
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Topic
Biomedical engineering
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Graduate School - New Brunswick Electronic Theses and Dissertations
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rucore19991600001
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http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.16718
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ETD_506
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doi:10.7282/T3HT2PQG
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ETD doctoral
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Copyright protected
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Open
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Meng Li
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Rutgers University. Graduate School - New Brunswick
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Non-exclusive ETD license
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I hereby grant to the Rutgers University Libraries and to my school the non-exclusive right to archive, reproduce and distribute my thesis or dissertation, in whole or in part, and/or my abstract, in whole or in part, in and from an electronic format, subject to the release date subsequently stipulated in this submittal form and approved by my school. I represent and stipulate that the thesis or dissertation and its abstract are my original work, that they do not infringe or violate any rights of others, and that I make these grants as the sole owner of the rights to my thesis or dissertation and its abstract. I represent that I have obtained written permissions, when necessary, from the owner(s) of each third party copyrighted matter to be included in my thesis or dissertation and will supply copies of such upon request by my school. I acknowledge that RU ETD and my school will not distribute my thesis or dissertation or its abstract if, in their reasonable judgment, they believe all such rights have not been secured. I acknowledge that I retain ownership rights to the copyright of my work. I also retain the right to use all or part of this thesis or dissertation in future works, such as articles or books.
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