DescriptionMost intracortical neural probes fail to function reliably in clinically relevant chronic settings due to neural tissue reactions to the implanted probes, which lead to the formation of glial encapsulation around the probe, insolating the recording sites from nearby neurons, resulting in degradation of the recorded signal quality. Recent studies indicate smaller and more flexible probes will elicit a relatively weaker reactive tissue response. This has been the impetus for researchers to reduce probe size and explore flexible polymers as probe substrate materials.
Previous work in our lab suggests that when the width of a Parylene based probe is narrowed below 80 μm, the neural tissue response can be substantially attenuated. However, when using conventional lithographic methods to pattern electrodes on a single layer, the number of recording sites that can be defined is limited, particularly for narrower probe widths. Therefore, I have adopted a novel strategy of increasing the number of recording sites without proportionally increasing the size of the probe by using a multilayer fabrication process to vertically layer recording traces on multiple Parylene support layers, allowing more recording traces to be defined on a smaller probe width.
Fabrication of the multilayer probe involves repeated photolithographic definition of titanium/platinum (Ti/Pt) electrodes, and chemical vapor deposition (CVD) of Parylene C. Reactive Ion Etching (RIE) in O2 plasma is then used to define the final probe geometry and open the recording sites. Following in vitro characterization and electrical package, the probe was implanted into the cerebral organoid and mice motor cortex to verify its electrophysiological recording capability.
Electrical characterization of the recording electrodes confirms the excellent functionality of the probe with a low degree of crosstalk between adjacent layers. In vitro and in vivo acute recording tests demonstrated the probes’ capability for single unit recording.