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Design and development of micromachined parylene-based electroactive membranes for biological applications
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Rebolledo Uscanga, Fernando Antonio. Design and development of micromachined parylene-based electroactive membranes for biological applications. Retrieved from https://doi.org/doi:10.7282/t3-hbj0-4008

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TitleDesign and development of micromachined parylene-based electroactive membranes for biological applications
NameRebolledo Uscanga, Fernando Antonio (author); Zahn, Jeffrey (chair); Freeman, Joseph W (member); Pierce, Mark C (member); Hassan, Umer (member); Shan, Jerry W (member); Rutgers University; School of Graduate Studies
Date Created2023
Other Date2023-10 (degree)
SubjectBiomedical engineering, Engineering, Lab-on-a-chip, Microactuator, Parylene C, Polymer micromachining, Polymer-based MEMS, System-on-a-chip
Extent211 pages
DescriptionIn the last few decades, the biomedical field has used semiconductor and microfabrication technologies to develop micro-scale devices and systems for biomedical, clinical research, and relevant biological applications. Such systems are commonly referred to as System-On-A-Chip (SOC) or Lab-On-A-Chip (LOC) devices. These microsystems often require the integration of multiple microfluidic functions such as pumping and actuation mechanisms, with their respective micromachined structures and components. Currently, many systems are fabricated using soft-lithography techniques employing micro-replica molding of Polydimethylsiloxane (PDMS) on SU-8 relief microstructures. For these approaches, it is common to use pneumatic actuation due to compatibility with the deformable PDMS structures. However, pneumatic actuation is often used for binary actuation states of pumping or valving architectures (open or closed) and does not always allow for precise actuation control, including reproducibility and reliability. In addition, these microsystems often require manual integration of their components utilizing bonding techniques and connections to and from off-chip components and pneumatic connections, resulting in the loss of integration capabilities. Therefore, there is a need to develop microsystems capable of increasing their integration capabilities with a better monolithic microfabrication approach, allowing for precise control and system packaging. To overcome these limitations, the main goal of this research effort was to explore the use of electrostatic actuation methods through the design and fabrication of micromachined Parylene-based electroactive membranes (μPEMs). This technology uses a multilayer, polymer-based, and monolithic microfabrication process approach. The actuation of this platform solely relies on electrostatic forces which eliminates the need for complicated interconnects and manual integration, with the potential to provide greater membrane deflection control, low power consumption, high reproducibility, and compact integration capabilities within a single chip. These chapters introduce, present, and describe the design, fabrication, and development of these μPEM devices and platforms with embedded microfluidic channel configurations for potential biological applications. We have successfully created these μPEM platforms consisting of Parylene C-based electrostatic actuators defined over a bulk micromachined cavity with varying film thicknesses. Embedded micro-shell structures which form microfluidic architectures and networks have been patterned and coupled on top of the membrane actuators within the same microfabrication process, making it a monolithically integrated platform with a repeatable fabrication approach.
NotePh.D.
NoteIncludes bibliographical references
Genretheses
Persistent URLhttps://doi.org/doi:10.7282/t3-hbj0-4008
LanguageEnglish
CollectionSchool of Graduate Studies Electronic Theses and Dissertations
Organization NameRutgers, The State University of New Jersey
RightsThe author owns the copyright to this work.
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